Ambient/ High-temp Prober
S1000 Ambient/High-temp Prober
Can perform electrical performance test for 8-inch or 12-inch wafers in ambient and high temperature
It is an automatic prober which can perform electrical performance test for 8-inch or 12-inch wafers. It is equipped with Bernoulli manipulator and porous gilded chuck and applicable to Thin wafer/Taiko wafer/curved silicon wafer (9mm).
S1000 Ambient/High-temp Prober
Specifications
DUT Type
Power, analog, logic and CIS, etc
Wafer Size
200mm/300mm
Wafer Thickness
Standard: 200-1250μm; Optional: Min. 50μm
Test Site
Max. 64 site
Index Time
240ms (X: 6mm, Z: 0.5mm)
Probing Force
50kg (Cable)
Test Temperature
Ambient temperature~150°C±1°C
MTBF
≥100h
Communication Interface
GPIB, RS-232
Optional Functions
Inker, Taiko wafer, Class10, porous gilded chuck, MES, etc.